Inspection Equipment
Technical Data
| Type | ES-CMM866 |
| Processing range |
Horizontal X travel distance 600mm |
| Outline dimension | 1735X1150X2647 |
| Length measure system | RENISHAW/HEIDENHAIN open grating ruler, resolution ratio 0.1μm |
| MPEe(um) | 2.8+L/300 |
| MPEp(um) | 3.5 |